Abstract
ABC-metamaterial, structured by repeating atomic layer deposition of three dielectric material-stack layers, opens the new possibility for creating second-order nonlinearity in CMOS-compatible photonics platforms. Here, the design and simulation of Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> waveguide with embedded ABC-metamaterial for generating second-harmonic (SH) of 1.55 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${\mu }\text{m}$ </tex-math></inline-formula> wave is presented. High-overlap-integral modal phase matching between the fundamental mode of the fundamental frequency and second-order mode of the SH is attained by properly engineering the waveguide geometry. Numerical analyzes show an absolute efficiency of 0.013% for 10 mW pump power in the straight waveguide which can be enhanced to at least 13.4% by employing a microring resonator.
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