Efficient pulse amplification using a transverse-flow CO_2 laser for extreme ultraviolet light source

Abstract

We constructed a master oscillator power amplifier CO2 laser system using a transverse-flow, RF-pumped CW CO2 laser. We carried out an amplification test at a 100% duty cycle of pumping discharge with the electrical input for the discharge up to 60 kW. An output power of 1.90 kW was achieved at the oscillator repetition rate of 100 kHz and the optical input power of 13 W. The electrical-to-optical efficiency was 3.1%.