Abstract
In this paper, a simple process to fabricate ordered Au nanodot arrays up to 520 nm in diameter that respond to infrared light is developed, and the feasibility of its application to infrared plasmonic sensors is shown. The developed process utilizes thermal dewetting to agglomerate a coated gold film into nanodots. It was difficult to produce large nanodots that responded to infrared light owing to dot separation. In this paper, therefore, the mechanism of dot agglomeration by thermal dewetting is studied via an experiment and theoretical model, and conditions to form single nanodots are clarified. Furthermore, Au nanodot arrays of 100 nm to 520 nm in diameter were fabricated by this process, and their absorption spectra were analyzed. In addition, an analysis of the change in the peak wavelength against the refractive index indicates the possibility of further improvement of the sensitivity of the infrared plasmon sensors.
Highlights
Metal nano/micro structures smaller than the wavelength of light such as nanodot arrays generate localized surface plasmon resonance by incident light
This study examined a simple and low-cost process for the fabrication of uniform metal nanodot arrays by combining nano plastic forming and thermal dewetting by annealing
The process conditions were clarified to produce relatively large nanodot arrays with a diameter up to 520 nm; these arrays could be useful for infrared light analysis
Summary
Metal nano/micro structures smaller than the wavelength of light such as nanodot arrays generate localized surface plasmon resonance by incident light. The authors developed a simple and efficient manufacturing method for metal nanodot arrays by combining nano plastic-forming and thermal dewetting [31,32,33,34,35]. Owing to dot separation in thermal dewetting, these Au nanodot arrays were limited to a diameter of 200 nm or less, and exhibited plasmon resonance in the visible light range. Because of that, they could not be applicable to the infrared sensors that require larger arrays. The authors aim to clarify the principle of thermal dewetting dot separation in their developed process and show a possible application of Au nanodot arrays to infrared plasmon sensors. The methods and results reported can be useful for fabrication of nanodot arrays of various metals
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