Abstract
We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5–6.7 nm from multiple laser beam-produced one-dimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine to yield intense unresolved transition arrays (UTAs) in Gd, Tb, and Mo. At an optimum laser intensity of 1 × 1012 W/cm2, which is estimated to yield an electron temperature of around 100 eV, the maximum in-band EUV conversion efficiency (CE) was observed to be 0.8%, which is one of the highest values ever reported due to the reduction of plasma expansion loss.
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