Abstract
We report on a theoretical study of binary phase transmission gratings for high-resolution EUV and soft X-ray spectroscopy and investigate their optical properties. Designed for wavelengths between about 2 and 40 nm, the devices may provide a first order diffraction efficiency beyond 30%. We use RCWA methods in order to optimize the grating design parameters and discuss special features of segmented grating arrays. Several elemental as well as compound materials like Be, Mo, LiF and PMMA are considered with respect to their potential and practical limitations in terms of feasibility and sensitivity to radiation damage. Simulations are performed for several samples on the radiation produced by a table-top EUV plasma source and applications to astrophysical problems are considered.
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