Abstract
The accurate detection and demodulation of mechanical oscillations is crucial for the performance of miniaturized resonant sensors and scanners. Demodulation by external instruments such as lock-in amplifiers or spectrum analyzers is not always desired due to their large size, complexity and cost. The demodulation technique proposed in this paper enables a simplified measurement of the oscillation amplitude of a mechanical oscillator with integrated deflection sensors, such as piezoresistive or capacitive elements. Configuring the sensors in an AC bridge circuit operated at the oscillator resonance frequency leads to a direct demodulation at the output of the bridge circuit. The presented method is experimentally verified on an AFM cantilever with integrated piezoresistive elements.
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