Abstract
The pressure and power dependences of the electron density have been measured in a parallel-plate RF discharge in Ar. It has been found that the density shows a maximum at a particular pressure and input power, indicating that there is an optimum condition for the absorption of RF power and its efficiency. A macroscopic model has been made using an equivalent circuit to explain the optimum condition for power absorption. A comparison of the experiment with the model is found to be useful for RF discharge apparatus design.
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