Efficiency of laser-induced backside wet microstructuring of sapphire increases with pressure

Abstract

The study is directed to the development of the complex machining of hard transparent materials such as quartz, sapphire, and diamond using pulsed laser light (5 ns pulse duration, 532 nm wavelength, 1 kHz repetition rate). The deepening rate of the laser-induced backside etching of sapphire in a water solution of silver nitrate was studied as a function of liquid pressure in the range of 0.1–25 MPa. Its linear increase of about 1.5–2 times with pressure was demonstrated, which associated with the stronger microbubbles cavitation impact on hard material and chemical etching by sub- and super-critical water. The increase in the etching efficiency of sapphire at a higher pressure for this particular case can be generalized to other types of laser-induced backside wet etching and other materials.