Abstract
In this paper, a facile fabrication technique called nanosphere lithography combining with two-step reactive ion etching method for patterning honeycomb metallic electrode with high transparency and excellent uniformity is demonstrated. The patterning silver electrode with 15-nm film thickness and 68.6% fill-factor was used as the organic light-emitting diode (OLED) anode, which showed an average transmittance of 77.4% and sheet resistance of 30.7Ω/□. The current efficiency is 8.35cd/A for the OLED with patterned silver anode under 100cd/m2 operation brightness, which was 47% higher than the device with indium tin oxide (ITO) anode. After applying the polystyrene nanosphere to form a photonic crystal array onto the device, the extracted light from organic mode can be further coupled out from device substrate mode. The overall luminous enhancement of the device with the combination of internal honeycomb metallic anode and external photonic crystal array is 115% higher than the traditional ITO-based OLED.
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