Efficiency‐enhanced and high‐precision of input common‐mode feedback control using OSA–CLS technique

Abstract

Efficiency-enhanced and high-precision input common-mode feedback control (ICMFB) is proposed for a fully differential readout circuit of the MEMS capacitive sensor. This ICMFB improves the efficiency and performance of input common-mode voltage control using a smaller feedback capacitor. The noise performance of the readout circuit is improved as a decrease of a feedback capacitor. The correlated level shift (CLS) technique is used to improve the output swing of the amplifier therefore reduce the value of a feedback capacitor. Also, the oversampling successive approximation (OSA) technique is used to improve the accuracy of input common-mode voltage control using a low-gain op-amp. Simulation results show that the input common-mode voltage error decreases to 0.01% when the value of the feedback capacitor is the same as the MEMS sensor. Also, the noise power spectral density of the readout circuit increases by 10 dB.