Abstract

ZnS thin films were deposited from different zinc salts by chemical bath deposition (CBD). Structural, morphological and optical characterizations were performed using different methods such as X-ray diffraction (XRD), scanning electron microscopy (SEM) and Raman spectra. The particle sizes of as-deposited ZnS thin films were calculated to be about 12.5–15.5nm and the crystal qualities were improved after annealed at 500 °C in Ar/H2S (5%) atmosphere. Optical absorption measurements indicated that the band gaps of ZnS thin films were in the range of 3.66–3.83eV and they decreased with the increasing of particle sizes. ZnCl2 was found to the best precursor due to the higher crystal quality and compact surface of deposited ZnS thin films.

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