Abstract
AbstractInfluences of the tip mass, excitation mode of Frequency Modulated Atomic Force Microscope (FM-AFM) on the resonance frequency shift in force modulation (FM) mode are studied. Governing equations of motion are determined based on Timoshenko beam model with concentrated end mass. Approach point and base amplitude are set such that the FM-AFM remains just in FM mode. Either the linearized and nonlinear Derjaguin-Muller-Toporov (DMT) model are investigated. Then frequency shifts are determined for various interaction force regimes. It is showed the effect of tip mass on frequency shift is significant even for small tips. Nonlinear model shows lower frequency shifts in comparison with linearized model. It is showed that the amplitude of response is increased by increasing the tip mass and order of base excitation. Deviation of frequency shift between linearized and nonlinear solution are studied. It is declared that the error between linearized and nonlinear model is complicated. A deviation index is used for explaining behavior of error while tip mass and excitation mode are changed. It is showed, this index predicts the trend of error in all excitation modes and force cases. Behavior of system is linearizing by increasing the order of excitation, generally.
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