Abstract
Ti-doped amorphous carbon multilayer films with different Ti content are deposited on medical Ti6Al4V alloy using a closed field unbalanced magnetron sputtering. The microstructure and chemical composition are characterized by high resolution transmission electron microscopy (HRTEM), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The mechanical and tribological properties are evaluated by nanoindentation, Rockwell and scratch tests and ball-on-disk tribometer. The Ti content has a significant influence on the microstructure, mechanical and tribological properties of Ti doped a-C multilayer films. TiC nanocrystallites started to form in the a-C:Ti layer when the Ti target current density was above 2.58mAcm−2 during multilayer deposition process. Among these multilayers, the film deposited with a Ti target current density of 4.13mAcm−2 displays high hardness (25.2GPa), high critical load (about 80N), and low friction coefficient and wear rate in ambient air and in Hank's solution.
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