Effects of thickness ratio on phase structures, mechanical properties, and wear behaviors of CrN/ZrB2 bilayer films

Abstract

CrN/ZrB2 bilayer films leveraging the wear resistance of CrN and the mechanical properties of ZrB2 were successfully produced and characterized. DC magnetron sputtering was used to deposit CrN/ZrB2 bilayer films with a thickness of approximately 1 μm and various ZrB2/CrN sublayer thickness ratios (TZrB2/TCrN = 10.85, 5.78, 4.50, 2.29, and 1.04). The thickness ratio was controlled by adjusting the deposition times of the individual sublayers. The effects of thickness ratio on the films' phase structures, mechanical properties, and wear resistance were investigated. The ZrB2 sublayer initially formed with a nanocrystalline structure; as its thickness increased, its texture became (001). As the thickness of the CrN sublayer increased, the CrN (111) reflection became more dominant, and the hardness of the CrN/ZrB2 bilayer films decreased from 19.8 to 11.6 GPa. In the CrN/ZrB2 bilayer films, the CrN sublayer was softer than the harder ZrB2 sublayer; specifically, the wear rate of the monolithic ZrB2 film was 6.45 × 10−5 mm3/N·m. This hardness enabled the bilayer films to exhibit excellent wear resistance with wear rates of 1.04–1.68 × 10−6 mm3/N·m. The wear behaviors of the CrN/ZrB2 bilayer films were classified into two tribological mechanisms in accordance with wear track observations. For the samples with high TZrB2/TCrN ratios, the shear mechanism dominated the wear behavior and resulted in the formation of a transfer layer on the worn surface. By contrast, the samples with low TZrB2/TCrN ratios had a ploughing mechanism in which a deformed track was generated on the surface.