Abstract
• Structures of K 0.5 Na 0.5 NbO 3 (KNN) films hardly change with the thickness. • The dielectric constants of films did not monotonously increase with the thickness. • The ferroelectric properties of films improved by increasing the thickness. Lead-free ferroelectric Mn-doped K 0.5 Na 0.5 NbO 3 (KNN) films with different thicknesses were deposited on Pt(1 1 1)Ti/SiO 2 /Si (1 0 0) substrates by a modified chemical solution deposition method. Single perovskite phase with (1 0 0)-texture was obtained in all films, whereas with the increase in thickness, the texture and morphologies were not dramatically changed. Dielectric and ferroelectric properties of KNN films were analyzed as a function of the thickness. It is found that the intrinsic and extrinsic contributions to the dielectric constant of KNN films are both increased. However, the dielectric constant of KNN films did not monotonously increase with the thickness increased. Eliminated the effect of leakage current of KNN film with the thickness of 0.65 μm, the coercive electric fields lowered and the remnant polarization of KNN films improved with increasing the thickness, indicating the improved ferroelectric properties of KNN films by increasing the thickness.
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