Abstract
The effects of thermal annealing below 500 °C on Spindt-type Mo field emitter arrays (FEAs) were studied through emission characteristics and Mo surface analysis. The anode current of the FEAs increases with increasing annealing time and then saturates after a certain period that is shorter for higher-temperature annealing. X-ray photoelectron spectroscopy and temperature programmed desorption show that MoO3 formed on the Mo surface desorbs at around 500 °C. The enhancement of the anode current is caused mainly by MoO3 desorption, since the period required for MoO3 desorption corresponds to that required for current saturation.
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