Abstract
Numerical simulations of argon inductively coupled plasmas (ICPs) were carried out by using the magneto-hydrodynamic equations and considering the different thermodynamic models inside the 10-kW ICP torch. The distribution characteristics of the flow velocity and the temperature were obtained and analyzed under thermodynamic equilibrium and nonequilibrium conditions, respectively. The effects of different typical discharge frequencies on the flow-field properties of the nonequilibrium argon ICP flow were also studied. The results indicate that the temperature distribution simulated by using the nonequilibrium model is more consistent with the experimental data than the one modeled by using the equilibrium model. The higher the discharge frequency is, the lower the maximum velocity and temperature of the nonequilibrium ICP flow are found to be.
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