Abstract
The MgO thin films are deposited at various inclined angles. The morphology investigated by scanning electron microscope (SEM) shows the MgO thin films deposited at high inclined angles have columnar grain. The relationships between full width high maximum (FWHM) of ω-scan, residual stresses and the inclined angles are studied. The results show the smallest FWHM of MgO (002) is 4.968°, the residual stress of MgO thin films is compressive stress, and the residual stress of MgO thin films deposited at the inclined angle of 55° is the smallest. So the microstructures of MgO thin films fabricated by the oblique angle deposition (OAD) technique effectively control the residual stresses.
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