Effects of Synthesis Parameters on CVD Molybdenum Disulfide Growth

Abstract

Since the isolation of graphene, a monolayer of sp2-bonded carbon atoms arranged in a hexagonal lattice, two-dimensional (2D) layered materials have attracted a great deal of attention due to their outstanding mechanical, optical and electronic properties. The research areas of interest for these new materials include exploring their novel properties, developing scalable approaches to synthesize these materials, and integrating them into a new generation of nanodevices. The utilization of 2D materials in devices has many advantages, which includes scaled materials to the limit of atomic-scale membranes, and the potential to form device structures on flexible and transparent substrates, among others. Transition metal dichalcogenides (TMDs) monolayers in particular, have received increasing attention in recent years, especially molybdenum disulfide (MoS2), which is one of the most well explored semiconducting materials in the 2D materials system. In this work we present the synthesis of MoS2 using chemical vapor deposition (CVD), where we have varied the synthesis parameters and compared the structure and quality of the CVD synthesized MoS2. At the same time, we have compared the characteristics with those obtained for mechanically exfoliated flakes from the bulk MoS2 crystal. The MoS2 quality has been analyzed using Raman spectroscopy.