Abstract
The thin film passivation is the key technology for the application of flexible organic light emitting diodes. We fabricated very effective gas barrier with Mg-Zn-F thin film using the RF magnetron sputter. In this study, we employed inorganic and organic buffer layers between Mg-Zn-F gas barrier and polyethylene naphthalate substrate to evaluate the effects of surface morphology. Organic layer had much lower surface roughness than that of inorganic layer. It is very effective to decrease water vapor transmission rate (WVTR). We showed that WVTR of gas barrier using organic layer and Mg-Zn-F film reached 4.5 × 10−4g/(m2·day) using calcium corrosion test.
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