Abstract
Diode-type TiO2 film gas sensors equipped with noble-metal (Pd or Pt) electrodes (M/TiO2, M = Pd or Pt) have been fabricated, and the effects of surface modification of the electrodes with Au on their H2-sensing properties have been investigated at 250oC in both air and N2 under dry and wet atmospheres. H2 response of M/TiO2 sensors in dry N2 was much larger than that in dry air, but the surface modification of the Pd or Pt electrode with Au (Au/Pd or Au/Pt) improved the H2 response, especially in dry air. In addition, the sensor with the Au/Pt electrode showed large and O2-independent H2 response under wet atmosphere.
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