Abstract
The (Y,Yb)MnO 3 films were prepared on various substrates using alkoxy-derived precursor solutions. On Pt(111)/TiO x /SiO 2 /Si substrates, it was found that the crystallographic properties of the (Y,Yb)MnO 3 films strongly depended on the composition (Y/Yb ratio) and crystallization condition. The change of crystallographic properties of the (Y,Yb)MnO 3 films was small on the films crystallized on Pt(111)/Al 2 O 3 (0001) and Y 2 O 3 (111)/Si(111) substrates. These films had higher degree of c-axis orientation and smooth surfaces compared with the films on Pt(111)/TiO x /SiO 2 /Si substrate. The change of morphology with crystallization condition was small.
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