Abstract
High quality Cr-doped ZnO thin films with Cr content of 2 at.% were prepared at substrate temperatures from 300 to 450 °C by RF magnetron sputtering. The effect of substrate temperature on the crystallographic structures and magnetic properties of the thin films were investigated by means of X-ray diffractrometry (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy and Physical Property Measurement System, respectively. XRD patterns show that all the prepared films with hexagonal wurtzite structure have a preferred orientation with the caxis perpendicular to the substrates plane. XPS spectra demonstrate that the Cr ions are in +3 valence state in doped ZnO films. Magnetic measurements reveal that the Crdoped ZnO thin films exhibit room-temperature ferromagnetism that becomes weaker with the increasing of the substrate temperature.The origin of the observed FM is interpreted by the overlapping of polarons mediated through oxygen vacancy based on the bound magnetic polarons models.
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