Effects of substrate temperature on electrical and structural properties of copper thin films

Abstract

This paper addresses the effects of substrate temperature on electrical and structural properties of dc magnetron sputter-deposited copper (Cu) thin films on p-type silicon. Copper films of 80 and 500nm were deposited from Cu target in argon ambient gas pressure of 3.6mTorr at different substrate temperatures ranging from room temperature to 250°C. The electrical and structural properties of the Cu films were investigated by four-point probe and atomic force microscopy. Results from our experiment show that the increase in substrate temperature generally promotes the grain growth of the Cu films of both thicknesses. The RMS roughness as well as the lateral feature size increase with the substrate temperature, which is associated with the increase in the grain size. On the other hand, the resistivity for 80nm Cu film decreases to less than 5μΩ-cm at the substrate temperature of 100°C, and further increase in the substrate temperature has not significantly decreased the film resistivity. For the 500nm Cu films, the increase in the grain size with the substrate temperature does not conform to the film resistivity for these Cu films, which show no significant change over the substrate temperature range. Possible mechanisms of substrate-temperature-dependent microstructure formation of these Cu films are discussed in this paper, which explain the interrelationship of grain growth and film resistivity with elevated substrate temperature.