Abstract
We investigated the effects of substrate rotation speed on the structural and mechanical properties of CrN/CrAlSiN multilayer coatings produced using high-power impulse magnetron sputtering (HiPIMS) on silicon and high-speed steel (HSS) substrates. Structural analysis and characterization of the multilayer coatings were performed using an X-ray diffractometer (XRD), field emission scanning electron microscopy (FE-SEM), an electron probe microanalyzer (EPMA), and a transmission electron microscope (TEM). The thickness of the bi-layer film depended on the substrate rotation speed, as follows: 12 (1.5 rpm), 9.5 (2 rpm), 6 (3 rpm), 4 (4 rpm), and 3.2 nm (5 rpm). The results revealed that the hardness and coating–substrate adhesion strength increased inversely with the thickness of the bi-layer. TEM analysis revealed smaller columnar structures in thinner CrN/CrAlSiN multilayer coatings. The highest results for hardness (20.1 GPa), elastic modulus (336 GPa), and adhesion strength (77 N) were obtained at a substrate rotation speed of 5 rpm. We also investigated the adhesion properties of the multilayer structures and formulated a hypothesis to explain adhesion strength.
Highlights
Coatings based on transition metal nitrides have proven highly effective in enhancing the performance of cutting tools, dies, and other mechanical components [1,2]
Increasing the rotation speed decreased the thickness of the CrN monolayer film
We investigated the influence of substrate rotation speed on the microstructure
Summary
Coatings based on transition metal nitrides have proven highly effective in enhancing the performance of cutting tools, dies, and other mechanical components [1,2]. Industrial PVD deposition systems rotate the substrate while depositing a homogeneous coating across the entire surface These systems allow for the mounting of multiple targets within the chamber to produce multilayer coatings with a variable modulation period by adjusting the rotation speed. Reported that the adhesion strength of CrN/Cr multilayers increased inversely with the thickness of the modulation period. It appears that Λ is a crucial parameter in the optimization of multilayer films. CrN/CrAlSiN multilayer films were fabricated via HiPIMS with a focus on microstructure, modulation period, mechanical properties, and adhesion strength as a function of substrate rotation speed
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
