Effects of substrate misorientation on triple-period ordering in AlInAs

Abstract

Substrate misorientation effects on triple-period (TP) ordering in Al0.48In0.52As were studied. When AlInAs was grown on a (001) InP substrate misoriented by 4° in the [111]A direction, TP-type ordering formed more strongly in the [111]A direction than in the [111]A direction. This asymmetric formation of TP-type ordering demonstrates that the step-arrays descending in the [110] direction play an important role in TP-type ordering formation in the [111]A direction. When AlInAs was grown at a higher temperature on a (001) InP substrate misoriented by 4° in the [111B direction, CuPt-type ordering was formed more strongly in the [111]B than in the [111]B direction. The importance of the [110] step in CuPt-type ordering, which is well established in GaInP systems, was thus reconfirmed in this study on AlInAs.