Effects of spray angle on three-dimensional isothermal solid–gas flow in a confined deposition chamber

Abstract

The effects of spray angle (β) on the three-dimensional isothermal solid–gas flow and deposition process in a confined deposition chamber are numerically investigated in the present study. The investigated cases include substrate spray angles equal to 90-, 75-and 45-deg. In the three spray-angle cases, β=75-deg case has the highest deposition efficiency, lowest distribution non-uniformity and comparative average impact velocity. Accordingly, β=75-deg is concluded as the optimal spray angle for the deposition chamber under the isothermal flow conditions. However, the relatively large amount of particles impact on the chamber wall, which is possible to block up the flow pass of the chamber, requires special cautions in practical applications.