Abstract
The effects of the speckle phenomenon on Makyoh-topography imaging is analysed. The speckle manifests itself as a quasiperiodic pattern in the Makyoh image which is easily mistaken for an image of a periodic surface morphology. The characteristic signature of speckles in Makyoh images is determined, thus allowing for its recognition. The effects of speckle on the Makyoh imaging is analysed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental parameters. It is shown that speckle effects are present even for incoherent illumination because of the coherency enhancement due to the limited source size. The findings are illustrated with experimental images of various semiconductor samples.
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