Abstract
When a gridded energy analyzer is used for energy analysis of plasma particles, it is experimentally found that the characteristics of the analyzer can be heavily affected by the space charge of particles accumulating behind its entrance grid. In this experiment, using a large model analyzer, the current profiles of accumulating ions in the analyzer and the effects of the space charges on ion energy distributions are directly measured in detail. Finally, problems related to the ion accumulation and the space charge effects in a gridded energy analyzer are generally discussed on the basis of the above experimental results.
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