Effects of rotor electrode in the fabrication of high aspect ratiomicrostructures by localized electrochemical deposition

Abstract

This work reports on the effect of electrode rotation on thegrowth of nickel micro-columns fabricated by the localized electrochemicaldeposition (LECD) process - a new truly three-dimensional micro-rapidprototyping and direct-fabrication process capable of producing extremelyhigh aspect ratio microstructures. The results shown here present a noveldevelopment in the area of LECD and a potential capability of the processfor the fabrication of micro-pipes for possible applications such asmedical drug delivery. Experiments were conducted on a specially assembledapparatus where nickel structures were electrodeposited onto Cu cathodesfrom a nickel sulfamate plating solution, using a non-soluble anodeelectrode. Deposition with electrode rotation produced columns with annuluscross sections, which indicate the existence of a uniform hollow core inthe columns. This feature and dimensional control in the growth of thecolumns were not observed when using a stationary electrode.