Abstract

Planar micro spring is an important elastic component in microelectromechanical system devices, and one of its main failures is fatigue. In this work, a new method to improve the cycles of a planar micro spring by introducing pre-rolled fibrous microstructure was proposed. Cu-5Al alloy billets with a fibrous microstructure rolled at room temperature with a reduction ratio of 70% were obtained. Three types of planar micro springs with fibrous microstructure were prepared through extrusion by varying the angle between the fibrous microstructure direction and the extrusion direction. Fatigue tests were conducted using a customized micro-fatigue test system. The best fatigue performance was obtained by preparing the micro springs with the fibrous microstructure direction perpendicular to the extrusion direction, while the worst fatigue performance was obtained by preparing the planar micro springs with the fibrous microstructure direction parallel to the extrusion direction. The fibrous microstructure direction affected the local strain in the micro springs. The fibrous microstructure slightly affected the location of the crack initiation region but significantly affected the area of crack initiation and steady-state expansion region of the micro spring. The fatigue life cycle of extruded Cu-5Al alloy planar micro spring with the pre-rolled fibrous microstructure improved by 58% more than that of extruded Cu-7Al alloy planar micro spring without the pre-rolled fibrous microstructure. Micro spring fatigue life cycle decreased with increasing strain amplitude. This work provides a new approach for preparing planar micro springs with high fatigue performance.

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