Effects of Pt/RuO2 hybrid bottom electrodes on the electrical properties of BST thin films

Abstract

The effects of the different bottom electrodes on the electrical properties of BST thin films have been investigated. The electrical properties of BST films spin- coated on Pt/RuO 2 hybrid electrodes were improved compared to the films on RuO 2 electrodes. The dielectric constant and dissipation factor of the 0.1 micrometers BST thin films on Pt/RuO 2 bottom electrodes were 582 and 0.035 at zero bias voltage. The leakage current density of this film was 7.2 X 10 -8 A/cm 2 at 1.5 V which was about one order of magnitude lower than leakage current density (5.2 X 10 -7 A/cm 2 at 1.5 V) of BST capacitor with RuO 2 films.