Effects of pressure sensor dimensions on process window of membrane thickness

Abstract

In some applications the purchase price of the pressure sensor can be prime consideration in the pressure sensor selection process. It is important to design a pressure sensor with a competitive price. The low-cost pressure sensor requires minimum dimensions of pressure sensor, while maintains allowed process window in fabrication. The cost of pressure sensor depends on pressure sensor size and process yield. In order to design low-cost pressure sensors, it is necessary to understand the process window. The membrane thickness of pressure sensor is a key parameter in fabrication. The process window of membrane thickness refers to the amount of variability that a process can tolerate while producing results that are acceptable. A smaller process window of membrane thickness has tighter acceptable variations of membrane thickness, and the suitable process window size is demanded in mass production. The effects of pressure sensor dimensions on the process window of the membrane thickness were studied in this paper. High-sensitivity pressure sensors have high resolution, small burst pressure, and small process window. The effect of the doping concentrations of resistors on the process window is also included. To decrease the temperature effect, the doping concentration of resistors was increased. The increasing doping concentration of the resistor will decrease the process window significantly.