Abstract
The effects of pressure on micromechanical air-filled cavities made by a pair of suspended, parallel silicon nitride membranes are investigated in the free molecular and quasi-molecular regimes. Variations of the fundamental drummode mechanical resonant frequencies and damping with air pressure are determined by means of optical interferometry. A kinetic damping linear friction force and a positive resonant frequency shift due to the compression of the fluid between the membranes are observed to be proportional to pressure in the range of 0.01–10 mbars. For resonators with near-degenerate modes, hybridization of the modes due to this squeeze film effect is also observed and well accounted for by a simple spring-coupled oscillator model.
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