Abstract

Al doped ZnO (AZO) nano-composite films were synthesized on glass substrates with the sol–gel spin-coating method at the room temperature. The activation energy of AZO nano-composite films was calculated to be 49kJ/mol for the particles growth. The electrical, structural and optical properties of AZO films were determined by changing ZnO:water and ZnO:Al ratios. ZnO:water and ZnO:Al ratios play an important role in controlling the electrical conductivity of the AZO nano-composite films. The optimum doping ratio of Al was found to be 2% in terms of the lowest resistivity, and above 2% Al-doping concentration, the surface resistivity of AZO nano-composite films starts to increase. The optical highest transmittance of the films of 86% in visible region, and low surface resistivity of 70Ω/□ can be obtained for the optimum doping ratio of Al.

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