Abstract
Effects of post-deposition heat treatment on the properties of plasma polymerized decahydronaphthalene (PPDHN) thin films were studied. Heat treatment at 150°C and 250°C decreased the relative dielectric constant k from 2.80, the k value of the as-deposited film, to 2.52 and 2.63, respectively. With the increase of the temperature of heat treatment, the thermal stability of the PPDHN thin film improved. Changes of the k value and thermal stability were related to changes of C-H, C=O and O-H group density.
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