Abstract
Y 2O 3 thin film waveguides were prepared by RF magnetron sputtering. The effects of post-deposition annealing on the structure and optical properties have been investigated. The structural evolution of Y 2O 3 films with annealing temperature was investigated by X-ray diffraction (XRD). Spectroscopic ellipsometry was employed to determine the optical properties of Y 2O 3 films annealed at various temperatures. It was found that with increasing annealing temperature, the refractive index ( n) of Y 2O 3 films increases. The optical band gap of Y 2O 3 films shifts to higher energy after higher temperature annealing, which is likely due to the reduction of defects and the change of crystalline structure in Y 2O 3 films.
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