Abstract
AbstractThe most common electrode structure for lead zirconium titanate (PZT) integrated on Si is platinum with a Ti adhesion layer. However, platinum hillocks that can lead to sample shorting may form during annealing. Careful selection of the Pt/Ti electrode architecture and deposition conditions can give nearly hillock-free electrodes. The phase development and ferroelectric properties of PZT prepared by metallo-organic decomposition (MOD) were studied as a function of Pt electrode structure and PZT composition. In addition to evaporated or sputtered Pt/Ti electrodes, Pt electrode layers were also prepared by MOD. MOD Pt layers showed no hillock formation but generally resulted in greater pyrochlore content in PZT capacitors.
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