Abstract
In this study, molecular dynamics (MD) are used to simulate the nanoimprinting behaviors of (001) Ni thin films using 3×3 array cuboid diamond punch. Different pitch of the punches was used to investigate the effect of the interaction among the forming pattern and the quality of the formed holes. Forming force was evaluated including normal and tractional force of the punch during pressing process. The dislocation behavior was also monitoring during the holes forming. The result showed that the pitch of the punch was 2w could get the best forming pattern.
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