Abstract

We investigated the effects of configuration of thin-film magnetoimpedance element on impedance profile. The parallel type and meander type sensor element were fabricated. The parallel line configuration has advantages to reduce a bias field and to enhance total inductance attributable to positive mutual inductance, while a large number of lines brings a decrement of impedance changes. The meander type induces a large demagnetizing effect and decrement of the total inductance due to negative mutual inductance. However, this configuration can utilize the space of the element, which contributes to enhance spatial resolution.

Highlights

  • Magnetoimpedance is electric impedance changes with a relatively higher carrier frequency when an external magnetic field is applied, which is attributed to permeability changes accompanied with electromagnetic phenomena such as skin effect and eddy current loss, and ferromagnetic resonance.1 Though this principle has already known in 1935,2 Mohri et al accelerate to develop highly sensitive magnetic sensor using magnetoimpedance effect since 1997.3 Many researches including material designs4,5 and development of theoretical models6–9 have been done on mainly wire and ribbon configurations, and recent research trends focus on a fabrication of microwire configuration10–12 and applications for biomedical field.13–16 While thin-film magnetoimpedance sensor has advantages of compatibility with integrated electronic circuits and of miniaturization aiming at field detection with high spatial resolution

  • Since thin-film can be patterned by a photo lithography technique, we can alter a configuration of sensor elements, which contributes to extensive design of sensor geometry considering the active sensor area, adjusting bias field and impedance value at bias point, etc

  • The slight change appears on impedance profiles, while the significant difference appears on inductance profile; the peak height decreases and the peak field shifts to higher field with increasing the value of wsp

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Summary

Introduction

Magnetoimpedance is electric impedance changes with a relatively higher carrier frequency when an external magnetic field is applied, which is attributed to permeability changes accompanied with electromagnetic phenomena such as skin effect and eddy current loss, and ferromagnetic resonance. Though this principle has already known in 1935,2 Mohri et al accelerate to develop highly sensitive magnetic sensor using magnetoimpedance effect since 1997.3 Many researches including material designs and development of theoretical models have been done on mainly wire and ribbon configurations, and recent research trends focus on a fabrication of microwire configuration and applications for biomedical field. While thin-film magnetoimpedance sensor has advantages of compatibility with integrated electronic circuits and of miniaturization aiming at field detection with high spatial resolution. Magnetoimpedance is electric impedance changes with a relatively higher carrier frequency when an external magnetic field is applied, which is attributed to permeability changes accompanied with electromagnetic phenomena such as skin effect and eddy current loss, and ferromagnetic resonance.. Magnetoimpedance is electric impedance changes with a relatively higher carrier frequency when an external magnetic field is applied, which is attributed to permeability changes accompanied with electromagnetic phenomena such as skin effect and eddy current loss, and ferromagnetic resonance.1 Though this principle has already known in 1935,2 Mohri et al accelerate to develop highly sensitive magnetic sensor using magnetoimpedance effect since 1997.3 Many researches including material designs and development of theoretical models have been done on mainly wire and ribbon configurations, and recent research trends focus on a fabrication of microwire configuration and applications for biomedical field.. We made parallel line type or meander type thin-film magnetoimpedance element, the effects of geometry or configuration on impedance profiles were systematically investigated

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