Abstract
Abstract Flexible-transparent-lithiated-lithium tantalum oxide (Li x TaO y C z ) films deposited onto 40 Ω/□ flexible polyethylene terephthalate/indium tin oxide substrates by low temperature plasma polymerization with an atmospheric pressure plasma jet (APPJ) at various flow rates oxygen gases are investigated. Precursors [lithium tert -butoxide, (CH 3 ) 3 COLi] and [tantalum ethoxide, Ta(OC 2 H 5 ) 5 ] 2 ] vapors are carried by argon gas, mixed by oxygen gas and injected into air plasma torch for fast synthesis of Li x TaO y C z films by short durations of the substrates, 33–37 s, exposed in the plasmas. The flexible-transparent Li x TaO y C z films possess the notable Li + ion intercalation and conduction performance for 200 cycles of reversible Li + ion intercalation and de-intercalation in a 1 M LiClO 4 -propylene carbonate electrolyte by switching measurements with a potential sweep from − 1.25 V to 1.25 V at a scan rate of 50 mV/s, even after being bent 360° around a 2.5 cm diameter rod for 1000 cycles. The Li + ionic diffusion coefficient and conductivity are respectively of up to 1.2 × 10 − 10 cm 2 /s and 1 × 10 − 8 S/cm for Li x TaO y C z films synthesized using an APPJ with a certain O 2 gases addition of 9 sccm.
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