Abstract
TiSiN coatings were deposited on WC/TiC/Co cemented carbides by arc ion plating combining with medium-frequency magnetron sputtering at different nitrogen flowrates, where one arc target of Ti and two magnetron targets of Si were used. The effects of nitrogen flowrate on Si content, microstructure, hardness and tribological behaviors of TiSiN coatings were investigated. Results showed that Si content and deposition rate of TiSiN coatings largely decreased as nitrogen flowrates increased. The coatings had a maximum hardness 34.3GPa at nitrogen flowrate of 180sccm with the Si content of 7.45at.%. Edge effect was found in all specimens, resulting in less Si contents in edge regions compared to central areas. Edge effect was diminished with the increase of nitrogen flowrates due to the decreased re-sputtering effect. Dry sliding tests against 40Cr hardened steel ball showed friction coefficient decreased and wear mechanism changed from adhesive wear, to abrasive wear, and to flaking with increasing nitrogen flowrate. The coating deposited at 180sccm had the best tribological performance with the wear rate of 1.73×10−6mm3/N·m and without obvious adhesion or flaking.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: International Journal of Refractory Metals and Hard Materials
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
