Abstract
Microstructures and soft magnetic properties of FeTaN films with various nitrogen contents have been investigated. When the nitrogen flow ratio of sputtering gas is low, characteristics of low permeability and high coercivity are ascribed to the abnormal grain growth of a /spl alpha/-Fe. On the other hand, the formation of a /spl epsi/-Fe/sub 2-3/N phase due to the presence of higher nitrogen content also caused deterioration of soft magnetic properties. A permeability value higher than 7500 was obtained for films with homogeneous microstructure and appropriate crystal size by critical control of nitrogen content.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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