Abstract
TiO2thin films of different N-doped quantity and different current density were deposited on medical glass slide by arc ion plating. Film structure, surface morphology and optical properties were measured with XRD, SEM and UV-VIS transmittance spectroscope. Photo-catalytic performance of the films was evaluated by degradation methyl orange. The current density, O2partial pressure and N2partial pressure were varied in order to determine their effect on the properties of TiO2films. The study got the best doped process (current 50A，O250sccm, N2250 sccm, Ar 20sccm). In these experimental conditions, the absorption edge successfully moved to 510nm, the as-deposited TiO2films structure was composed with anatase and rutile. The annealing treatment made the crystal microscopy more obviously. The N-doped TiO2film not only reduced the UV catalytic performance , but also extended the catalytic properties to the sun light.
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