Abstract
Cantilever deflection sensitivity () calibration is a critical issue for a correct transduction of the electric signal into mechanical one in atomic force microscopy (AFM)-nanoindentation. Indenter-induced strains in calibration samples can negatively impact on the calibration reliability, becoming more important as the cantilever deflection () set for this calibration process is increased. In this work, we present a systematic study regarding the setpoint effects on the value calibration. setpoints between 0.05 and 1 [V] were considered for measurements, observing a clear decreasing trend in the value for 0.125 [V] concerning the most accurate value 192 [nm/V]. The results demonstrate that underestimations up to 10% concerning this value may be obtained by choosing non-adequate setpoints. This study shows the relevance of the setpoint for accurate calibration, which is essential for reliable quantitative studies of mechanical properties.
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