Abstract
Tht effects of N addition on the magnetic properties and structure of Fe-Hf-O sputtered films were investigated. The addition of N to Fe 88-93 Hf 2-3 O 5-9 thin films was found to decrease the coercivity, H c , both in the as-deposited state and after annealing at 773K to 873K, owing to the smaller ?-Fe (bcc phase) crystal grains. In particular, Fe 85.1 Hf 2.1 O 5.5 N 7.3 films composed of the bcc phase with fine (150 A) grains, ?-Fe 4 N and hafnium oxide nitride, exhibited a low coercivity of 64 A/m and a high saturation magnetization, B s , of about 1.7 T even after annealing at 873K. With its high B s , low H c and good thermal stability, such film is expected to prove useful as a magnetic head material.
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