Abstract

The mechanical breakage and electrical open failure of the flipchip bump interconnection are main issues that retarding the scale shrinkage of the 3D interconnections. In this study, the effects of the microstructure of the nickel electrodeposits on the growth of Sn-Ni intermetallic compound (IMC) and on the electro-migration (EM) reliability were investigatged. The crystal structure of the Ni diffusion barrier can be controlled by addition of additives in electroplating bath. When both coumarin and cis-2-butene-1,4-diol were contained in the bath, extremely fine grain Ni electrodeposits were deposited by the synergistic effects of the additives. The growth rate of Ni3Sn4 IMC formed on the interface between the extremely fine grain structured Ni layer and Sn solder is higher than that of the IMC formed on the interface between the large grain structured Ni layer and Sn solder. The EM failure stage corresponds to large void propagation at the Sn-Ni3Sn4 interface due to volume consumption of Sn for IMC formation. The results of STEM analysis in an early stage of the heat treatment of the solder demonstrated that substantial quantities of Ni atoms were dominantly dissolved into the liquid Sn layer. Ni3Sn4 IMC was mainly formed on the finely grained Ni layer due to the high dissolution of Ni atoms into the solute Sn during the reflow process. IMC growth was suppressed at the interface between the large and fine grain structured area. This study suggests a robust concept of the vertical structure of Ni diffusion barrier having a multi layered Ni microstructure, which can reinforce an adhesion property as well as diffusion barrier properties Figure 1

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