Abstract
Abstract This work is intended to characterize the fluid conducting behaviour of microcapillary systems containing various 3D microstructures and surface modifying molecular layers. The microchannels are patterned by secondary structures mimicking the natural water-conducting tissue (xylem) of dry-habitat plants. The complex microstructure of the microcapillary system was developed by bulk silicon micromachining technology, applying multistep Deep Reactive Ion Etching (DRIE) to fabricate and pattern the microfluidic channels subsequently. The inner surfaces of the capillary systems were covered by Atomic Layer Deposition (ALD) of different oxide layers to control their wetting properties. We demonstrated that the fluid conducting behaviour of the fabricated capillary systems can be systematically controlled by structural patterning and surface modification of the channels.
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