Effects of matching network on mode transitions in a helicon wave plasma source

Abstract

An experimental research on multi-stable mode transitions and hysteresis loops in a high magnetic field helicon wave plasma source is conducted by adjusting matching network parameters. The correspondence relation between the electric circuit and plasma parameters is explored by measuring the plasma absorbed power, plasma electron density, and power transfer efficiency. The details of mode transitions are recorded by measuring the transmission coefficient to understand the feedback effects on the electric circuit from the plasma. Three discharge modes are observed in helicon discharge: the capacitively coupling mode (E mode), the inductively coupling mode (H mode), and the wave coupling mode (W mode). When the plasma absorbed power increases, the discharge mode directly jumps from the E mode to the W mode, while the discharge mode jumps in the order of W–H–E when the plasma absorbed power decreases. In such multi-stable systems, the plasma may be in different modes under the same set of circuit conditions. Hysteresis loops exist even when the dissipative power in the matching network is subtracted, which indicates that the main cause of hysteresis is nonlinearities inside the plasma.