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Abstract
We have found that the soft magnetic properties of FeN/AlN laminated films do not degrade on sloping surfaces. The easy axis coercivities of FeN/AlN multilayer films are approximately 1.5 Oe and have little variation with slope angle, α. The anisotropy fields slightly vary from 13 to 17 Oe when the slope angles (α) change from 0° to 60°. In contrast, single layer FeN films show a significant degradation of soft magnetic properties with the slope angle. Residual stress does not have a significant correlation with magnetic properties. The large coercivities and saturation fields in the single layer FeN films can be ascribed to a change in the (110) texture of the films.
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